Three-dimensional Nano-motion System for SPM-based CMM

• SAWANO Hiroshi

  Precision and Intelligence Laboratory, Tokyo Institute of Technology

• GOKAN Toshimichi

  Precision and Intelligence Laboratory, Tokyo Institute of Technology

• YOSHIOKA Hayato

  Precision and Intelligence Laboratory, Tokyo Institute of Technology

• SHINNO Hidenori

  Precision and Intelligence Laboratory, Tokyo Institute of Technology

Abstract

Demands for measurement of three dimensional (3D) micro-geometries over a large area have recently increased in a variety of industries. In order to meet such requirements, it is necessary to realize a novel coordinate measuring machine (CMM) with a three-dimensional nano-motion system which has high resolution, high response and large measuring area. In this study, a three-dimensional nano-motion system was developed for a scanning probe microscopy (SPM) based CMM with nanometer spatial resolution. The system developed is composed of an X-Y planar nano-motion table system driven by voice coil motors (VCMs), a Z axis nano-motion system driven by a hybrid actuator and a probe holder that equipped with SPM probes. Performance evaluation results confirm that the system simultaneously achieves a long travel range, a high positioning resolution and a high stability.

Journal

• Journal of Advanced Mechanical Design, Systems, and Manufacturing

  Journal of Advanced Mechanical Design, Systems, and Manufacturing 4 (6), 1192-1200, 2010

  The Japan Society of Mechanical Engineers

Keywords

• Nano Motion
• Micro Geometry
• Coordinate Measuring Machine
• Voice Coil Motor
• Piezoelectric Actuator
• Scanning Probe Microscopy

Details

• CRID: 1390282680249759616
• NII Article ID: 130000428100
• DOI: 10.1299/jamdsm.4.1192
• ISSN: 18813054
• Web Site: http://www.jstage.jst.go.jp/article/jamdsm/4/6/4_6_1192/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed