光電子による密閉空間の超清浄化

• 藤井 敏昭

  埼玉大学大学院理工学研究科 (株)荏原総合研究所

• 鈴木 英友

  (株)荏原総合研究所

• 足立 元明

  大阪府立大学付属研究所

• 坂本 和彦

  埼玉大学大学院理工学研究科

書誌事項

タイトル別名

• Super Cleaning of Closed Space by Photoelectron

抄録

A new method of super cleaning for submicron particles in closed space (UV/photoelectron method) was developed. The charging and collecting unit employed either reflection-type photoelectron emitter or transmission-type one. The units mainly consisted of ultraviolet ray lamps, a photoelectron emitter and electrode. In this paper, characteristics and advantages of the units were studied. The mechanisms of particle charging and collection by the unit were also theoretically investigated. The particles received charges of negative ions generated by the photoelectron emission through the diffusion charging. The theoretical consideration on the deposition rate showed that the particle collection in the unit was achieved mainly by an electrophoresis of charged particles.

収録刊行物

• エアロゾル研究

  エアロゾル研究 8 (3), 239-248, 1993

  日本エアロゾル学会

キーワード

• Photoelectron
• Fine Particle
• Cleanliness
• Photoelectric Effect
• Charging
• Clean Room
• Super Cleaning

詳細情報

• CRID: 1390282679319136384
• NII論文ID: 130000649462
• DOI: 10.11203/jar.8.239
• COI: 1:CAS:528:DyaK2cXitleitLg%3D
• ISSN: 1881543X
• ISSN: 09122834
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可