Characterization of a MEMS resonator with extended hysteresis

• Naik Suketu

  Department of Electrical Engineering, Kyoto University

• Hikihara Takashi

  Department of Electrical Engineering, Kyoto University

抄録

In this paper an electrostatically driven MEMS resonator with resonance and hysteresis characteristics is reported. The resonator begins to exhibit spring-hardening effect at ac excitation voltage of 105mV and dc bias voltage of 5V in vacuum at 50Pa. An extended hysteresis at low pressure and high excitation voltage during upsweep and downsweep of excitation frequency was observed. This characteristic facilitates the usage of this type of resonator in a range of applications such as a cascaded filter array or as a high bandwidth resonator.

収録刊行物

• IEICE Electronics Express

  IEICE Electronics Express 8 (5), 291-298, 2011

  一般社団法人 電子情報通信学会

キーワード

• MEMS resonator
• spring-hardening effect
• hysteresis

詳細情報

• CRID: 1390282680191156224
• NII論文ID: 120004996611
• NII論文ID: 130000654678
• DOI: 10.1587/elex.8.291
• ISSN: 13492543
• HANDLE: 2433/163466
• Web Site: http://www.jstage.jst.go.jp/article/elex/8/5/8_5_291/_pdf
• 本文言語コード: en
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• 抄録ライセンスフラグ: 使用不可