Removal of Boron from Metallurgical-grade Silicon by Applying the Plasma Treatment.
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- Suzuki Kichiya
- Department of Metallurgy, Faculty of Engineering, The University of Tokyo
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- Kumagai Tomonori
- Faculty of Engineering, The University of Tokyo
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- Sano Nobuo
- Department of Metallurgy, Faculty of Engineering, The University of Tokyo
抄録
The removal of boron from metallurgical-grade silicon was investigated by applying an Ar/H2O plasma treatment to develop a new production technique for low cost solar-grade silicon (SOG-Si).<br>The concentration of boron in MG-Si decreased from 35.7 to 0.4 ppmw, satisfying the requirement for SOG-Si, using Ar+1.24vol%H2O plasma gas for 25 min of melting time. It has been demonstrated that the overall rate of elimination of boron is controlled by the diffusion of boron in silicon melts. The removal of boron is affected by the kind of plasma operating gas with the highest elimination rate of boron by Ar/H2O plasma. The experimental findings support that boron in silicon reacts with oxygen in gas only at the plasma-impinging area.<br>It may be said that only this technique has the possibility to lower boron content of silicon down to the required 0.1 ppm for SOG.
収録刊行物
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- ISIJ International
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ISIJ International 32 (5), 630-634, 1992
一般社団法人 日本鉄鋼協会
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詳細情報 詳細情報について
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- CRID
- 1390001206452069760
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- NII論文ID
- 130000763163
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- COI
- 1:CAS:528:DyaK38XltFCmtLg%3D
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- ISSN
- 13475460
- 09151559
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可