半導体ひずみゲージ式センサにおけるオフセット温度ドリフトの補償

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  • A Compensation Method for the Temperature Offset Drift on the Semiconductor Piezoresistive Sensors
  • ハンドウタイ ヒズミ ゲージシキ センサ ニ オケル オフセット オンド ドリ

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This paper describes a new compensation method for the temperature offset drift on the semiconductor piezoresistive sensors such as pressure sensor and accelerometer.<br>The offset drift compensation was conventionally carried out with the method in which a parallel resistor is inserted into a part of the piezoresistive gages. This method, however, has a disadvantage in that the second-order errors dependent both on the second-order coefficient of piezoresistors and that of the original offset drift remain.<br>We used a new temperature compensation circuit including a temperature sensitive voltage supply and a compensation resistor, with which both the first-order and the second-order temperature offset drift could be completely canceled, achieving about 1/30 reduction of the offset temperature error, compared with the conventional method.

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