Design and synthesis of mesoporous ZrO2 thin films using surfactant Pluronic P123 via sol-gel technique

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  • SOO Mun Teng
    Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology School of Materials and Mineral Resources Engineering, Engineering Campus, Universiti Sains Malaysia
  • KAWAMURA Go
    Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology
  • MUTO Hiroyuki
    Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology
  • CHEONG Kuan Yew
    School of Materials and Mineral Resources Engineering, Engineering Campus, Universiti Sains Malaysia
  • LOCKMAN Zainovia
    School of Materials and Mineral Resources Engineering, Engineering Campus, Universiti Sains Malaysia
  • NOOR Ahmad Fauzi Mohd
    School of Materials and Mineral Resources Engineering, Engineering Campus, Universiti Sains Malaysia
  • MATSUDA Atsunori
    Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology

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Mesoporous ZrO2 thin films were fabricated via sol–gel technique by introducing a surfactant, Pluronic P123. The mesoporous structure was tailored by altering several key processing variables including calcination temperature and heating rate. The samples prepared were characterized systematically with X-ray diffraction and electron microscopy. The pore size of the mesoporous ZrO2 synthesized was ca. 8 nm and the corresponding thin film thickness was ca. 60 nm. It was found that at a relatively high heating rate, the mesoporous ZrO2 produced had partially-ordered mesoporous structure and its wall structure was semi-crystalline. A mechanism was proposed for this structure formation.

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