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- TANAKA Wataru
- Hitachi Research Laboratory, Hitachi, Ltd.
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- ARAI Tatsuo
- Graduate school of engineering science, Osaka university
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- INOUE Kenji
- Graduate school of faculty of engineering, bio-system engineering, Yamagata university
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- TAKUBO Tomohito
- Graduate school of engineering science, Osaka university
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- PARK Choong Sik
- Technology Research Institute of Osaka Prefecture
抄録
We investigated a calibration method of a parallel mechanism stage which is installed under a microscope. Our proposed method uses measurement data of the 2-DOF translations on the surface (x-y plane) of the end-effector and the rotation about the axis (z) perpendicular to the surface, and these measurement data are obtained by the measurement method with a micro grid pattern. We discuss the calibration method with simulations and experiments for a stage comprised of a fixed linear actuated parallel mechanism. The results show that the calibration which restricts measurement data to those 3-DOF of the end-effector is possible and has good performance.
収録刊行物
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- Journal of Environment and Engineering
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Journal of Environment and Engineering 6 (4), 739-752, 2011
一般社団法人 日本機械学会
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キーワード
詳細情報 詳細情報について
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- CRID
- 1390001205261709952
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- NII論文ID
- 130000792145
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- ISSN
- 1880988X
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可