ナノインデンテーション試験による界面強度評価のための推定除荷曲線法

• 上月 謙太郎

  （株）ブリヂストンタイヤ研究部

• 因幡 和晃

  東京工業大学大学院理工学研究科

• 岸本 喜久雄

  東京工業大学大学院理工学研究科

書誌事項

タイトル別名

• Method of Estimated Unloading Curve for Evaluation of Interfacial Strength by Nanoindentation Test

抄録

A new evaluation method was proposed for the interfacial strength between a thin film and its substrate by nanoindenation test. In this method, the released energy due to a coating delamination is obtained by estimating the shapes of the unloading curve at the points just after and before delamination on the load-displacement curve. Shape of unloading curves can be assumed by obtaining the contact stiffness of thin films. To confirm the validity of the method, nanoindentation tests were conducted for polyimide (PI) coating / Si substrate specimens and the interfacial strength was evaluated. Three specimens that have different thickness were prepared. Contact stiffness of PI film bears a linear relationship with indentation load. Irrespective of the coating thickness, the values of the interfacial strengths converge. In addition, the values of strengths agree with the results obtained by the authors in the previous paper for the case that small scale yielding conditions are satisfied. For the case that indentation loading rate is high and the delamination occurs before the relaxation of film, it is necessary to measure the contact stiffness with each indentation loading rate.

収録刊行物

• 日本機械学会論文集Ａ編

  日本機械学会論文集Ａ編 77 (776), 629-637, 2011

  一般社団法人 日本機械学会

キーワード

• Thin Film
• Interface
• Delamination
• Energy Release Rate
• Fracture Toughness
• Nanoindentation
• Estimated Unloading Curve

詳細情報

• CRID: 1390001204477021952
• NII論文ID: 130000874041
• DOI: 10.1299/kikaia.77.629
• ISSN: 18848338
• ISSN: 03875008
• Web Site: http://www.jstage.jst.go.jp/article/kikaia/77/776/77_776_629/_pdf
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
  • KAKEN
• 抄録ライセンスフラグ: 使用不可