Estimation of Current Density Distribution in LSI Electroplating by an Efficient Inverse Analysis of Electric Potential

• KISHIMOTO Yoshinao

  Department of Mechanical Engineering, Tokyo City University

• ABE Yuji

  東京都市大学大学院工学研究科機械工学専攻

• KOBAYASHI Yukiyoshi

  Department of Mechanical Engineering, Tokyo City University

• OHTSUKA Toshihisa

  Department of Mechanical Engineering, Tokyo City University

• AMAYA Kenji

  東京工業大学大学院情報理工学研究科情報環境学専攻

Bibliographic Information

Other Title

• 槽内電位の効率的逆解析によるLSIめっき電流密度分布の推定

Abstract

Our research focuses on the techniques for monitoring the current density distribution of the real-time electroplating and a novel technique to estimate electroplating current densities on plated surfaces from the data of the electric potentials in the plating cells has been developed for LSI fabrication technology. However we have applied with only two dimensional analysis in our previous researches and it limits the application range of the proposed technique. In this research, we applied the monitoring technique with three dimensional analysis. Although the inverse analysis using the three dimensional analysis tends to be large scale, it is important for the practical usage to monitor current density on target region accurately and efficiently. Therefore we have developed an efficient inverse analysis technique for monitoring of the electroplating current density on the target region. For the selection of the measurement data and the reduction of the calculation amount for the inverse analysis, the proposed technique discards low sensitive components in the observation equation. The criteria of the discarding process are based on error ratios derived by singular values of the observation equation. In order to demonstrate the effectivity of the proposed technique, numerical simulations are performed for a sample polarization curve of copper in copper sulfate. The results show that this technique estimates the current density on target region accurately and its estimation is more efficient than that by the previous technique.

Journal

• TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A

  TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A 77 (782), 1671-1686, 2011

  The Japan Society of Mechanical Engineers

Keywords

• Inverse Problem
• Large-Scale Problem
• Diagnostic Technique
• Large-Scale Integration
• Electroplating
• Electrochemistry
• Analytical Model
• Boundary Element Method
• Model Selection
• Tikhonov Regularization
• Information Criterion

Details

• CRID: 1390282679454540288
• NII Article ID: 130001423270
• DOI: 10.1299/kikaia.77.1671
• ISSN: 18848338
• ISSN: 03875008
• Web Site: http://www.jstage.jst.go.jp/article/kikaia/77/782/77_782_1671/_pdf
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed