書誌事項
- タイトル別名
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- Three-Dimensional Profile Measuring System with AFM Probe
抄録
Demands for measuring three-dimensional (3D) micro-geometries over a large scanning range have recently increased in a various industries such as aerospace, dies and molds, energy, etc. This paper presents a newly developed 3D profile measuring system with both a large scanning range (18mm×18mm×10mm) and a nanometer resolution. The profile measuring system developed is consisted of an AFM probing system and a newly developed 3D nano-motion system with a large travel range. Elimination of motion errors in the nano-motion system enables the AFM probe to scan a specimen with a nanometer resolution. The measurement results of an optical lens confirmed that the developed system achieves high measurement accuracy over a large scanning range.
収録刊行物
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- 日本機械学会論文集C編
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日本機械学会論文集C編 77 (782), 3597-3607, 2011
一般社団法人 日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1390282681363329408
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- NII論文ID
- 130001433445
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- ISSN
- 18848354
- 03875024
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
- KAKEN
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- 抄録ライセンスフラグ
- 使用不可