Three-Dimensional Profile Measuring System with AFM Probe

• AYADA Sho

  Tokyo Institute of Technology

• SAWANO Hiroshi

  東京工業大学精密工学研究所

• YOSHIOKA Hayato

  東京工業大学精密工学研究所

• SHINNO Hidenori

  東京工業大学精密工学研究所

Bibliographic Information

Other Title

• ＡＦＭプローブを用いた三次元形状計測システム

Abstract

Demands for measuring three-dimensional (3D) micro-geometries over a large scanning range have recently increased in a various industries such as aerospace, dies and molds, energy, etc. This paper presents a newly developed 3D profile measuring system with both a large scanning range (18mm×18mm×10mm) and a nanometer resolution. The profile measuring system developed is consisted of an AFM probing system and a newly developed 3D nano-motion system with a large travel range. Elimination of motion errors in the nano-motion system enables the AFM probe to scan a specimen with a nanometer resolution. The measurement results of an optical lens confirmed that the developed system achieves high measurement accuracy over a large scanning range.

Journal

• TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C

  TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C 77 (782), 3597-3607, 2011

  The Japan Society of Mechanical Engineers

Keywords

• Shape Measurement
• Precision Instrument
• Positioning
• Atomic Force Microscopy
• Coordinate Measuring Machine

Details

• CRID: 1390282681363329408
• NII Article ID: 130001433445
• DOI: 10.1299/kikaic.77.3597
• ISSN: 18848354
• ISSN: 03875024
• Web Site: http://www.jstage.jst.go.jp/article/kikaic/77/782/77_782_3597/_pdf
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed