High-Q SWCPL for CMOS millimeter-wave technology

• Mat D. A. A.

  Department of Electronics, Graduate School of ISEE, Kyushu University Department of Electronics, Faculty of Engineering, University Malaysia Sarawak

• Pokharel R. K.

  EJUST Centre, Kyushu University

• Sapawi R.

  Department of Electronics, Graduate School of ISEE, Kyushu University

• Kanaya H.

  Department of Electronics, Graduate School of ISEE, Kyushu University

• Yoshida K.

  Department of Electronics, Graduate School of ISEE, Kyushu University

Abstract

In this paper, slow wave coplanar waveguide transmission line (SWCPL) is proposed on patterned ground shields in 0.18µm CMOS technology for low-loss passive devices, components and interconnects in millimeter wave region. Patterned grounds act to produce the slow-wave effect and they are usually kept below the metallization plane to reduce dielectric loss of the lossy silicon substrates. The measured attenuation loss and phase constant of the proposed CPW are 0.619dB/mm and 2.574rad/mm, respectively which result in the Quality factor (Q-factor) to be 18 at 54GHz.

Journal

• IEICE Electronics Express

  IEICE Electronics Express 9 (15), 1284-1289, 2012

  The Institute of Electronics, Information and Communication Engineers

Keywords

• attenuation loss
• CPW
• pattern ground
• quality factor
• slow wave

Details

• CRID: 1390282680189602432
• NII Article ID: 130001921389
• DOI: 10.1587/elex.9.1284
• ISSN: 13492543
• Web Site: https://www.jstage.jst.go.jp/article/elex/9/15/9_1284/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed