Scanning Probe for Coordinate Measurement Using a Translational Parallel Mechanism (Prototyping of the Isotropic Mechanism and Calibration of the Mechanical Parameters)

• HARADA Takashi

  Kinki University, Faculty of Science and Engineering, Department of Mechanical Engineering

• 董 科

  近畿大学大学院 総合理工学研究科

• 金丸 健太

  近畿大学

Bibliographic Information

Other Title

• パラレルメカニズムを用いた座標計測用倣いプローブに関する研究（感度等方メカニズムの設計試作と機構キャリブレーション）

Abstract

A 3-dof active scanning probe using a translational parallel mechanism (TPM) is proposed. In this paper, the characteristics of the mechanism, optimum design, prototyping, and accuracy of the TPM are introduced. In the proposed optimum TPM design, the manipulability of the mechanism is equal in all directions. This implies that the positional sensitivities of the TPM share an isotropic relationship. The positional resolution of the mechanism becomes 0.58 μm in a cubic working range with side length of 1.6 mm. An experimental mechanism using the proposed design is introduced. Relationships between positioning errors and mechanical parameters of the TPM are revealed by applying the error propagation analysis. In order to evaluate the accuracy of the TPM, we have developed an experimental system for the measurement of the position of the TPM using image processing. By applying mechanical parameters calibration, the accuracy of the absolute position of the TPM has been improved to 3.4 μm.

Journal

• TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C

  TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C 78 (787), 826-841, 2012

  The Japan Society of Mechanical Engineers

Keywords

• Parallel Mechanism
• Positioning
• Kinematics
• Isotropic Design
• Error Analysis
• Calibration

Details

• CRID: 1390001206387463168
• NII Article ID: 130002051349
• DOI: 10.1299/kikaic.78.826
• ISSN: 18848354
• ISSN: 03875024
• Web Site: https://www.jstage.jst.go.jp/article/kikaic/78/787/78_787_826/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed