Numerical Investigation on Identification of Piezoelectric Strain Constants on Basis of Displacement Response in Piezoelectric Thin Films

• UETSUJI Yasutomo

  Dept. of Mech. Eng., Osaka Inst. of Tech.

• OGAWA Ryota

  Dept. of Mech. Eng., Osaka Inst. of Tech.

• TODA Yusuke

  Dept. of Mech. Eng., Osaka Inst. of Tech.

• TSUCHIYA Kazuyoshi

  Dept. of Precision Eng., Tokai Univ.

Bibliographic Information

Other Title

• 圧電薄膜の変位応答に基づく圧電ひずみ定数同定の数値解析的検討
• アツデン ハクマク ノ ヘンイ オウトウ ニ モトズク アツデン ヒズミ テイスウ ドウテイ ノ スウチ カイセキテキ ケントウ

Abstract

In order to characterize piezoelectric thin films fabricated on silica substrate, the relation between displacement response and piezoelectric strain constants have been analyzed by finite element method. At first, the effect of substrate dimensions on deformation was investigated when an electric load was applied to piezoelectric thin film by disc-type electrode. And then, a displacement measuring condition to reduce size dependence was searched by using two parameters, which are the thickness of piezoelectric thin film and the radius of top electrode. Computational results indicated that piezoelectric strain constant d₃₃ of thin film has good correlation and its value can be identified with displacement response under the appropriate measuring condition.

Journal

• Journal of the Society of Materials Science, Japan

  Journal of the Society of Materials Science, Japan 57 (3), 297-303, 2008

  The Society of Materials Science, Japan

Keywords

• Piezoelectric thin film
• Piezoelectric strain constant
• Displacement response
• Finite element analysis

Details

• CRID: 1390001205417686272
• NII Article ID: 130002085762
• NII Book ID: AN00096175
• DOI: 10.2472/jsms.57.297
• ISSN: 18807488
• ISSN: 05145163
• NDL BIB ID: 9420858
• Web Site: http://id.ndl.go.jp/bib/9420858
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9420858
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed