A Micro Pump Driven by a Thin Film Permanent Magnet

• ZHI Chao

  Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology

• SHINSHI Tadahiko

  Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology

• UEHARA Minoru

  Magnetic Materials Research Laboratory, Hitachi Metals, Ltd.

Abstract

A valveless micro pump, utilizing a multi-layer thin film NdFeB/Ta permanent magnet (TFPM), is presented. The micro pump consists of a diaphragm actuator, comprising a TFPM, 6µm in thickness and 3 mm in diameter, which is bonded to a membrane made of polydimethylsiloxane (PDMS) of about 80µm in thickness, together with a pump chamber and a pair of diffuser elements. TFPM is sputtered on a 50µm thick Nb sheet. The diffuser elements are used to generate a one-way fluid flow. The chamber is made of acryl plates. UV negative film resist is used to bond the different layers. Compared to sinusoidal driving signal with same amplitude, a square driving signal can generate a higher flow rate. Applying a square wave voltage, ±7.5V in amplitude, the pump flow rate attains 130µL/min at a frequency of 15Hz. The flow rate is highly dependent on frequency and driving signal type. Diaphragm displacement, pump frequency is measured and analyzed.

Journal

• Journal of Advanced Mechanical Design, Systems, and Manufacturing

  Journal of Advanced Mechanical Design, Systems, and Manufacturing 6 (7), 1180-1189, 2012

  The Japan Society of Mechanical Engineers

Keywords

• Valveless Micro Pump
• Thin Film Permanent Magnet
• Diffuser
• Electromagnetic Actuation
• Square Wave Signal

Details

• CRID: 1390001205271055488
• NII Article ID: 130002099455
• DOI: 10.1299/jamdsm.6.1180
• ISSN: 18813054
• Web Site: https://www.jstage.jst.go.jp/article/jamdsm/6/7/6_1180/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed