Improvement of Laser Trapping Based Microprobe in Laser Shaded Condition

• MICHIHATA Masaki

  Department of Mechanical Engineering, Osaka University

• TAKAYA Yasuhiro

  Department of Mechanical Engineering, Osaka University

• HAYASHI Terutake

  Department of Mechanical Engineering, Osaka University

抄録

A micro-probe based on laser trapping has been proposed for the probe system of a nano-coordinate measuring machine. This study focused on the “shadow effect,” which is the case wherein a partial beam for laser trapping is shaded by the specimen. A radially polarized beam was introduced to improve the shadow effect. As the result of increasing the trapping efficiency by 3.2 times, this high-efficient laser trapping made it possible to extend the measurable range of the vertical surface under the shadow effect.

収録刊行物

• Journal of Advanced Mechanical Design, Systems, and Manufacturing

  Journal of Advanced Mechanical Design, Systems, and Manufacturing 6 (6), 764-770, 2012

  一般社団法人 日本機械学会

キーワード

• Laser Trapping
• Microprobe
• Radial Polarization
• Coordinate Metrology
• Finite Difference Time Domain Method
• Nano-CMM

詳細情報

• CRID: 1390001205273084544
• NII論文ID: 130002099508
• DOI: 10.1299/jamdsm.6.764
• BIBCODE: 2012JAMDS...6..764M
• ISSN: 18813054
• Web Site: https://www.jstage.jst.go.jp/article/jamdsm/6/6/6_764/_pdf
• 本文言語コード: en
• データソース種別:
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  • CiNii Articles
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