Selective Crystallization of Magnetic Garnet Films on Bragg Mirrors by Laser Annealing

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  • レーザ熱処理を用いた誘電体ミラー上の磁性ガーネット薄膜の選択的結晶化
  • レーザ ネツ ショリ オ モチイタ ユウデンタイ ミラー ジョウ ノ ジセイ ガーネット ハクマク ノ センタクテキ ケッショウカ

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Abstract

  One of realization of magnetophotonic crystals (MPCs) has a microcavity structure where a thin magnetic garnet film-bismuth-substituted yttrium iron garnet (Bi:YIG)-is sandwiched between two Bragg mirrors (BMs) made of Ta2O5 and SiO2. For MPCs fabricated by sputtering, annealing of as-sputtered Bi:YIG films is essential for garnet crystallization. However, Ta2O5 is also crystalized at garnet crystallization temperatures, when utilizing a conventional annealing in an electric furnace. Ta2O5 crystallization worsens optical parameters of BMs and consequently properties of an MPC. To overcome this problem, we selectively annealed as-sputtered Bi:YIG/BM samples by a high power laser. Experiments showed that Bi:YIG can be crystallized while keeping Ta2O5 in the amorphous state; this was confirmed by the transmission electron microscopy.

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