ナノ計測の標準化:最近の動向とロードマップ  [in Japanese] Standardization of Measurement and Characterization for Nanotechnology: Recent Trend and Roadmap  [in Japanese]

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Author(s)

Journal

  • Journal of the Vacuum Society of Japan

    Journal of the Vacuum Society of Japan 56(7), 249-251, 2013

    The Vacuum Society of Japan

Codes

  • NII Article ID (NAID)
    130003369632
  • NII NACSIS-CAT ID (NCID)
    AA12298652
  • Text Lang
    JPN
  • ISSN
    1882-2398
  • NDL Article ID
    024760273
  • NDL Call No.
    Z16-474
  • Data Source
    NDL  J-STAGE 
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