Manufacture and Performance of a 60GHz-Band High-Efficiency Antenna with a Thick Resin Layer and the Feed through a Hole in a Silicon Chip

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As a first step towards the realization of high-efficiency on-chip antennas for 60GHz-band wireless personal area networks, this paper proposes the fabrication of a patch antenna placed on a 200µm thick dielectric resin and fed through a hole in a silicon chip. Despite the large tan δ of the adopted material (0.015 at 50GHz), the thick resin reduces the conductor loss at the radiating element and a radiation efficiency of 78%, which includes the connecting loss from the bottom is predicted by simulation. This calculated value is verified in the millimeter-wave band by experiments in a reverberation chamber. Six stirrers are installed, one on each wall in the chamber, to create a statistical Rayleigh environment. The manufactured prototype antenna with a test jig demonstrates the radiation efficiency of 75% in the reverberation chamber. This agrees well with the simulated value of 76%, while the statistical measurement uncertainty of our handmade reverberation chamber is calculated as ±0.14dB.

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