Synthesis and Characterization of Carbon Nanotube-Cu Composite using Supercritical Fluid Deposition

• An Zhonglie

  Graduate school of engineering, Tohoku University Micro System Integration Center (µSIC), Tohoku University

• Toda Masaya

  Graduate school of engineering, Tohoku University

• Ono Takahito

  Graduate school of engineering, Tohoku University

抄録

We propose a new approach to synthesize a carbon nanotube (CNT) - copper (Cu) composite on a silicon substrate using combination of supercritical fluid deposition (SCFD) and electrochemical plating (ECP) process. The measured density of the composite is 8.2±0.3 g/cm³, and the volume percentage of voids is 3∼6%. The evaluated thermal resistance including the thermal interface resistance and bulk resistance of the composite is 28.4∼42.1 mm²KW^-1. It shows the potential ability of the CNTs-Cu composite for thermal interface material.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 134 (2), 38-39, 2014

  一般社団法人 電気学会

キーワード

• Carbon nanotubes-Cu composite
• Supercritical fluid deposition
• Thermal interface resistance

詳細情報

• CRID: 1390001204462289920
• NII論文ID: 130003391580
• DOI: 10.1541/ieejsmas.134.38
• ISSN: 13475525
• ISSN: 13418939
• Web Site: https://www.jstage.jst.go.jp/article/ieejsmas/134/2/134_38/_pdf
• 本文言語コード: en
• データソース種別:
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  • Crossref
  • CiNii Articles
  • KAKEN
• 抄録ライセンスフラグ: 使用不可