デスクトップ型DRIE装置を用いたチタニウム微細加工  [in Japanese] Micromachining of Titanium using a Desktop DRIE  [in Japanese]

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Author(s)

Abstract

In this paper, we report a micromachining of titanium using a desktop DRIE and fabrication of microstructure. We found out high speed exhaust characteristic is indispensable in the etching of titanium, and the etching rate more than 0.2 µm/min (a maximum rate is 0.4 µm/min) was provided in a small amount of etching gas (SF<sub>6</sub>). As the demonstration of the method, we fabricated microneedles imitating mosquito's proboscis. We revealed that it is available for fabricating precision microstructure. Titanium has excellent mechanical property and corrosion resistance, and it is expected to be used as a material for MEMS. In this method, it is expected to apply to fabricate the three-dimensional structures.

In this paper, we report a micromachining of titanium using a desktop DRIE and fabrication of microstructure. We found out high speed exhaust characteristic is indispensable in the etching of titanium, and the etching rate more than 0.2 µm/min (a maximum rate is 0.4 µm/min) was provided in a small amount of etching gas (SF<sub>6</sub>). As the demonstration of the method, we fabricated microneedles imitating mosquito's proboscis. We revealed that it is available for fabricating precision microstructure. Titanium has excellent mechanical property and corrosion resistance, and it is expected to be used as a material for MEMS. In this method, it is expected to apply to fabricate the three-dimensional structures.

Journal

  • IEEJ Transactions on Sensors and Micromachines

    IEEJ Transactions on Sensors and Micromachines 134(4), 96-99, 2014

    The Institute of Electrical Engineers of Japan

Codes

  • NII Article ID (NAID)
    130003391596
  • NII NACSIS-CAT ID (NCID)
    AN1052634X
  • Text Lang
    JPN
  • ISSN
    1341-8939
  • NDL Article ID
    025466960
  • NDL Call No.
    Z16-B380
  • Data Source
    NDL  J-STAGE 
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