Micromachining of Titanium using a Desktop DRIE

• Yamada Shuji

  Graduate School of Science and Technology, Niigata University

• Hitobo Takeshi

  Tateyama Machine Co., LTD.

• Sohgawa Masayuki

  Graduate School of Science and Technology, Niigata University

• Abe Takashi

  Graduate School of Science and Technology, Niigata University

Bibliographic Information

Other Title

• デスクトップ型DRIE装置を用いたチタニウム微細加工
• デスクトップガタ DRIE ソウチ オ モチイタ チタニウム ビサイ カコウ

Abstract

In this paper, we report a micromachining of titanium using a desktop DRIE and fabrication of microstructure. We found out high speed exhaust characteristic is indispensable in the etching of titanium, and the etching rate more than 0.2 µm/min (a maximum rate is 0.4 µm/min) was provided in a small amount of etching gas (SF₆). As the demonstration of the method, we fabricated microneedles imitating mosquito's proboscis. We revealed that it is available for fabricating precision microstructure. Titanium has excellent mechanical property and corrosion resistance, and it is expected to be used as a material for MEMS. In this method, it is expected to apply to fabricate the three-dimensional structures.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 134 (4), 96-99, 2014

  The Institute of Electrical Engineers of Japan

Keywords

• Titanium
• Reactive Ion Etching
• DRIE
• Biomimetics
• Fluorine gas
• MEMS

Details

• CRID: 1390282679438793216
• NII Article ID: 130003391596
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.134.96
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 025466960
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I025466960
• Web Site: https://www.jstage.jst.go.jp/article/ieejsmas/134/4/134_96/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed