Fabrication of Concave and Convex Structure Array Consisted of Epoxy Long-Nanowires by Light and Heavy Ion Beams Lithography

DOI Web Site 被引用文献1件 参考文献21件
  • Takano Katsuyoshi
    Division of Applied Chemistry, Graduate School of Engineering, Osaka University
  • Sugimoto Masaki
    Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency
  • Asano Atsushi
    Division of Applied Chemistry, Graduate School of Engineering, Osaka University
  • Maeyoshi Yuta
    Division of Applied Chemistry, Graduate School of Engineering, Osaka University
  • Marui Hiromi
    Division of Applied Chemistry, Graduate School of Engineering, Osaka University
  • Omichi Masaaki
    Division of Applied Chemistry, Graduate School of Engineering, Osaka University
  • Saeki Akinori
    Division of Applied Chemistry, Graduate School of Engineering, Osaka University
  • Seki Shu
    Division of Applied Chemistry, Graduate School of Engineering, Osaka University
  • Satoh Takahiro
    Quantum Beam Science Directorate, Japan Atomic Energy Agency
  • Ishii Yasuyuki
    Quantum Beam Science Directorate, Japan Atomic Energy Agency
  • Kamiya Tomihiro
    Quantum Beam Science Directorate, Japan Atomic Energy Agency
  • Ohkubo Takeru
    Quantum Beam Science Directorate, Japan Atomic Energy Agency
  • Koka Masashi
    Quantum Beam Science Directorate, Japan Atomic Energy Agency
  • Nishikawa Hiroyuki
    Department of Electrical Engineering, Shibaura Institute of Technology

抄録

New microprocessing method with a combination of Proton Beam Writing (PBW) and Single Particle Nanofabrication Technique (SPNT) was demonstrated to control a location and a shape on cohering epoxy nanowires. The feature of this method is to utilize a flame structure which is able to rectify the solvent flow at the development and drying. At first, flame array with a rectification for solvent flows were fabricated by the PBW using SU-8 photoresist films. And next, long nanowires with the length over 50 μm were obliquely formed on these flames by heavy beam with the energy of hundreds MeV. In the case of the overwriting on the passage-type flame, concave structures which consist of the nanowires were formed with matrix array. On the other hand, convex structures were formed among the each cavity-type flame. It was shown that the polymer nanowires were can be controlled the cohering shape and the fixing at designed locations by the flames to rectify the solvent flow.

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