STRUCTURAL INVESTIGATION OF SPUTTERED CoCrTa/Cr RIGID DISK MEDIA USING X-RAY DIFFRACTION

• FUKAZAWA MOTOHARU

  Research Center. Denki Kagaku Kogyo

• FURUKAWA YOICHIRO

  Research Center. Denki Kagaku Kogyo

• ENDO KATSUHISA

  Research Center. Denki Kagaku Kogyo

• HAYASHI TAKUYA

  Research Center. Denki Kagaku Kogyo

• TAKENO HIROSHI

  Research Center. Denki Kagaku Kogyo

抄録

The crystalline structure of CoCrTa/Cr rigid disks was investigated by using Bragg-Brentano and grazing incidence X-ray diffraction techniques (BBXRD and GIXRD). CoCrTa files were sputtered on various thicknesses of a Cr underlayer. BBXRD and GIXRD data show that the Cr(200) and CoCrTa(110) textures increase and the c-axis of the CoCrTa film lies in the plane of the disk as the Cr thickness is increased. These results suggest that an epitaxial correlation between CoCrTa(110) and Cr(200) exists.

収録刊行物

• Analytical Sciences

  Analytical Sciences 7 (Supple), 1215-1216, 1991

  社団法人 日本分析化学会

キーワード

• X-ray diffraction
• CoCrTa/Cr rigid magnetic disk

詳細情報

• CRID: 1390001204258218752
• NII論文ID: 130003529341
• DOI: 10.2116/analsci.7.supple_1215
• ISSN: 13482246
• ISSN: 09106340
• Web Site: http://www.jstage.jst.go.jp/article/analsci1985/7/Supple/7_Supple_1215/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可