STRUCTURAL INVESTIGATION OF SPUTTERED CoCrTa/Cr RIGID DISK MEDIA USING X-RAY DIFFRACTION
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The crystalline structure of CoCrTa/Cr rigid disks was investigated by using Bragg-Brentano and grazing incidence X-ray diffraction techniques (BBXRD and GIXRD). CoCrTa files were sputtered on various thicknesses of a Cr underlayer. BBXRD and GIXRD data show that the Cr(200) and CoCrTa(110) textures increase and the c-axis of the CoCrTa film lies in the plane of the disk as the Cr thickness is increased. These results suggest that an epitaxial correlation between CoCrTa(110) and Cr(200) exists.
- Analytical Sciences
Analytical Sciences 7(Supple), 1215-1216, 1991
The Japan Society for Analytical Chemistry