Fabrication of Micro Molding Inserts by LIGA Process Using of Synchrotron Radiation.

• KITADANI Takeshi

  Sawa Plating Industrial Co. Ltd.

• UTSUMI Yuichi

  Laboratory of Advanical Science and Technology for Industry, Himeji Institute of Technology

• HATTORI Tadashi

  Laboratory of Advanical Science and Technology for Industry, Himeji Institute of Technology

Bibliographic Information

Other Title

• 放射光による応用加工技術の現状と将来　　放射光ＬＩＧＡプロセスによるマイクロ金型の作製

Journal

• JOURNAL OF THE JAPAN WELDING SOCIETY

  JOURNAL OF THE JAPAN WELDING SOCIETY 71 (3), 150-153, 2002

  JAPAN WELDING SOCIETY

Keywords

• マイクロシステム
• LIGA
• 放射光
• 電解析出
• めっき
• 内部応力

Details

• CRID: 1390001206499625728
• NII Article ID: 130003764223
• DOI: 10.2207/qjjws1943.71.150
• ISSN: 18837204
• ISSN: 00214787
• Text Lang: ja
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles