エキシマレーザによるアブレーション加工の基礎的研究　２　　プローブレーザビームを用いたエキシマレーザ誘起プラズマの解析

• 大家 利彦

  工業技術院四国工業技術研究所

• 宮本 勇

  大阪大学

書誌事項

タイトル別名

• Analysis of Excimer Laser-induced Plasma Using Probe Laser Beam. Fundamental Research of Materials Processing by Excimer Laser. (Report 2).
• Fundamental Research of Materials Processing by Excimer Laser (Report 2)
• エキシマレーザによるアブレーション加工の基礎的研究(第2報)

抄録

We made time resolved measurements of laser-plasma interaction to study the effects of laser-induced plasma on laser processing during laser irradiation. A probe laser of 40 microns diameter was used for the measurements. The reduction of the probe laser intensity by laser-induced plasma was observed in the latter part of a laser pulse. The radial distributions of plasma absorption coefficients and removal depth were measured at various diameters of uniform intensity beams. A plasma absorption model where plasma expands vertically was developed and, using the model, the effect of laser-induced plasma on drilling speed was estimated.

収録刊行物

• 溶接学会論文集

  溶接学会論文集 16 (4), 431-436, 1998

  一般社団法人 溶接学会

キーワード

• Laser-induced plasma
• Probe laser
• Plasma absorption
• Drilling speed
• Absorption coefficient
• Non-uniform plasma

詳細情報

• CRID: 1390001204724220288
• NII論文ID: 130003934523
• DOI: 10.2207/qjjws.16.431
• ISSN: 24348252
• ISSN: 02884771
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可