Adsorption and Reaction of Calcium at the Si(111) Surface Studied by Metastable-Induced Electron Spectroscopy

• Shirouzu Yasuo

  Department of Electrical Engineering/Electronics, Kyushu Institute of Technology, Japan

• Kaya Yoshinori

  Department of Electrical Engineering/Electronics, Kyushu Institute of Technology, Japan

• Okazaki Tomokazu

  Department of Electrical Engineering/Electronics, Kyushu Institute of Technology, Japan

• Watanabe Akihiko

  Department of Electrical Engineering/Electronics, Kyushu Institute of Technology, Japan

• Naitoh Masamichi

  Department of Electrical Engineering/Electronics, Kyushu Institute of Technology, Japan

• Nishigaki Satoshi

  Department of Electrical Engineering/Electronics, Kyushu Institute of Technology, Japan

• Ikari Tomonori

  Ube National College of Technology, Japan

• Yamada Kenji

  Ishikawa National College of Technology, Japan

Abstract

Reaction between deposited Ca layers and the Si(111) substrate has been studied by metastable-induced electron spectroscopy (MIES) and low-energy electron diffraction (LEED). When a Ca-deposited (about 1ML) Si(111) surface was annealed at temperatures in the range 470-570 K, the MIES spectrum showed a peak, named P_s, at a binding energy of about 7 eV which is assigned to be an isolated Si3s state. By referring electronic structure calculations for the bulk Ca-silicides, we confirmed that a solid-phase reaction at the Ca/Si interface to induce Ca₂Si-like phases takes place at rather low annealing temperatures around 570 K. When Ca-covered (about 0.6 ML) Si(111) surfaces were annealed at temperatures in the range 770-870 K, the LEED showed 2× 1, 5× 1 and quasi-3× 2 reconstructions, depending on the temperature. We obtained MIES spectra from these surfaces involving spectral features which reflect local atomic structures of those Ca+Si surface phases. Correlations between the local atomic structure and the electronic structure probed by the MIES are discussed. [DOI: 10.1380/ejssnt.2007.89]

Journal

• e-Journal of Surface Science and Nanotechnology

  e-Journal of Surface Science and Nanotechnology 5 89-93, 2007

  The Japan Society of Vacuum and Surface Science

Keywords

• Silicon
• Calcium
• Silicide
• Metastable-induced electron spectroscopy
• Low-energy electron diffraction

Details

• CRID: 1390001205187637888
• NII Article ID: 130004439066
• DOI: 10.1380/ejssnt.2007.89
• ISSN: 13480391
• Web Site: http://www.jstage.jst.go.jp/article/ejssnt/5/0/5_0_89/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed