The Systems of TOF-low Energy Ne Scattering Spectroscopy for Insulator

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Author(s)

    • Umezawa Kenji
    • Department of Physics, Graduate School of Science, College of Integrated Arts & Sciences, Osaka Prefecture University, Japan

Abstract

We have developed a home-made low-energy Ne scattering system combined with a time-of-flight spectrometer for insulator surface structural analysis. Insulator surface structure is difficult to study because of charging effects during electron or ion beam bombardment. To avoid the charging effects, low energy atom particle beams (2keV-<sup>20</sup>Ne<sup>0</sup>) were projected onto the sample surfaces. As an example of data measured by the developed system, a time of flight spectrum obtained from MgO (001) crystal is presented. [DOI: 10.1380/ejssnt.2010.194]

Journal

  • e-Journal of Surface Science and Nanotechnology

    e-Journal of Surface Science and Nanotechnology (8), 194-196, 2010

    The Surface Science Society of Japan

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