The Systems of TOF-low Energy Ne Scattering Spectroscopy for Insulator

• Umezawa Kenji

  Department of Physics, Graduate School of Science, College of Integrated Arts & Sciences, Osaka Prefecture University, Japan

Abstract

We have developed a home-made low-energy Ne scattering system combined with a time-of-flight spectrometer for insulator surface structural analysis. Insulator surface structure is difficult to study because of charging effects during electron or ion beam bombardment. To avoid the charging effects, low energy atom particle beams (2keV-²⁰Ne⁰) were projected onto the sample surfaces. As an example of data measured by the developed system, a time of flight spectrum obtained from MgO (001) crystal is presented. [DOI: 10.1380/ejssnt.2010.194]

Journal

• e-Journal of Surface Science and Nanotechnology

  e-Journal of Surface Science and Nanotechnology 8 194-196, 2010

  The Japan Society of Vacuum and Surface Science

Keywords

• Ion scattering spectroscopy
• Ne
• MgO
• Surface structure
• Ion-solid interations

Details

• CRID: 1390282680162060800
• NII Article ID: 130004439228
• DOI: 10.1380/ejssnt.2010.194
• ISSN: 13480391
• Web Site: http://www.jstage.jst.go.jp/article/ejssnt/8/0/8_0_194/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed