スパッタ成膜中のイオン衝撃が Ni 薄膜の内部応力に及ぼす影響  [in Japanese] Ion Bombardment Effects on Internal Stress of Ni Thin Film during Sputter Deposition Process  [in Japanese]

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Author(s)

    • 豊田 椋一 Toyoda Ryoichi
    • 東海大学大学院工学研究科応用理学専攻 Department of Applied Science, Graduate School of Engineering, Tokai University
    • 郡 亜美 Kohri Ami
    • 東海大学大学院工学研究科応用理学専攻 Department of Applied Science, Graduate School of Engineering, Tokai University

Abstract

  In this study, the effects of an ion bombardment parameter <i>P</i><sub>i</sub> of argon (Ar), krypton (Kr) and xenon (Xe) on the internal stress and crystal structure of a nickel (Ni) thin film were discussed. Ni thin films were prepared by a DC magnetron sputtering process. Ar, Kr and Xe were used as sputtering gases. As a means of expressing the effect of ion bombardment, the ion bombardment parameter <i>P</i><sub>i</sub> based on the magnitude of ion momentum <i>P</i><sub>G<sup>+</sup></sub> (G: Ar, Kr or Xe) and an impingement ratio of sputtering gas ions <i>i</i><sub>G<sup>+</sup></sub> to that for Ni particles <i>a</i><sub>Ni</sub> was proposed. Plasma diagnostics were carried out with a single Langmuir probe during the sputter deposition. The magnitude of the ion momentum estimated from the plasma potential was independent of the cathode discharge power. With an increase in cathode discharge power, the increase in <i>a</i><sub>Ni</sub> onto the substrate was greater than the increase in <i>i</i><sub>G<sup>+</sup></sub>. It has become evident that the ratio of impingement <i>i</i><sub>G<sup>+</sup></sub> to <i>a</i><sub>Ni</sub> onto the substrate mainly affects the variation in <i>P</i><sub>i</sub> in relation to the cathode discharge power. The FWHM (full width at half maximum) of X-ray diffraction peaks and the internal stress of the films varied linearly with the ion bombardment parameter <i>P</i><sub>i</sub> regardless of the sputtering gas species. The internal stress of Ni thin films could be controlled by adjusting the ion bombardment parameter <i>P</i><sub>i</sub>.<br>

Journal

  • Journal of the Japan Institute of Metals and Materials

    Journal of the Japan Institute of Metals and Materials 78(3), 132-136, 2014

    The Japan Institute of Metals and Materials

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