Effect of Perpendicular Magnetic Anisotropy on the High Frequency Soft Magnetic Properties of Co-Al-N Films

• Kijima H.

  Center for Interdisciplinary Research, Tohoku University

• Ohnuma S.

  Research Institute for Electromagnetic Materials

• Masumoto H.

  Center for Interdisciplinary Research, Tohoku University

抄録

  The high frequency soft magnetic properties (μ-f properties) of magnetically isotropic Co-Al-N films have been investigated. The Co-Al-N films with a Co content of around 80 at.% were prepared by the rf-sputtering method to change the distance between target and substrate (d_T-S). The magnetization curves reveal that the films have a perpendicular magnetic anisotropy and are magnetically isotropic in the film plane. The saturation magnetic field (H_s) can be changed from 120 to 640 Oe as d_T-S increases from 40 to 80 mm. The films show a stripe domain with a domain width of 400-500 nm, which decreases as increasing the perpendicular magnetic anisotropy increases. The films exhibit excellent μ-f properties, and their permeability keeps constant up to a few GHz and shows a clear peak at resonance frequency (f_r), which shifts from 0.75 to 2.4 GHz correspond to the magnitude of their H_s.

収録刊行物

• Journal of the Magnetics Society of Japan

  Journal of the Magnetics Society of Japan 36 (4), 287-292, 2012

  公益社団法人 日本磁気学会

キーワード

• high frequency soft magnetic properties
• nano-granular film
• perpendicular magnetic anisotropy
• stripe domain
• rf-magnetron sputtering

詳細情報

• CRID: 1390001205286165632
• NII論文ID: 130004502820
• NII書誌ID: AA12297999
• DOI: 10.3379/msjmag.1206r007
• COI: 1:CAS:528:DC%2BC38Xht1Ogtb3K
• ISSN: 18822932
• ISSN: 18822924
• NDL書誌ID: 023869784
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I023869784
• 本文言語コード: en
• データソース種別:
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