Fabrication of High-Quality Nb/Al-AlOx-Al/Nb Junctions by a Simple Process.

• Mizutani Naoki

  Superconducting Sensor Laboratory, 2–1200 Muzaigakuendai, Inzai, Chiba 270–13

• Uehara Gen

  Superconducting Sensor Laboratory, 2–1200 Muzaigakuendai, Inzai, Chiba 270–13

• Yamasaki Shuichi

  Superconducting Sensor Laboratory, 2–1200 Muzaigakuendai, Inzai, Chiba 270–13

• Adachi Akira

  Superconducting Sensor Laboratory, 2–1200 Muzaigakuendai, Inzai, Chiba 270–13

• Takada Youichi

  Superconducting Sensor Laboratory, 2–1200 Muzaigakuendai, Inzai, Chiba 270–13

• Kado Hisashi

  Electrotechnical Laboratory, 1–1–4 Umezono, Tsukuba, Ibaraki 305

抄録

We have fabricated Nb/Al-AlO _x-Al/Nb junctions that have extremely low leakage currents by a simple process using only two mask levels. Reducing the thickness of the Al layer under the AlO _x improved the quality. For a 20 µ m² junction, the current at 0.5 mV at 0.5 K was 4 or more orders of magnitude lower than that at 4.2 K. For 0.70 µ m² junctions, the current at 0.5 mV below 1.5 K was 3 or more orders of magnitude lower than that at 4.2 K. We have also fabricated ultra small junctions of high quality. These high-quality junctions can be fabricated by a simple process, hence they are appropriate for various applications.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 33 (11A), L1515-L1518, 1994

  The Japan Society of Applied Physics

キーワード

• Nb/Al-AlO<SUB> x</SUB>-Al/Nb junction
• edge junction
• leakage current
• quasiparticle tunnel current
• small junction

詳細情報

• CRID: 1390282681222411136
• NII論文ID: 110003921553
• NII論文ID: 210000036627
• NII論文ID: 130004519535
• NII書誌ID: AA10650595
• DOI: 10.1143/jjap.33.l1515
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.33.L1515
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.33.L1515/pdf
• 本文言語コード: en
• データソース種別:
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