Simulated Computed Tomography for the Reconstruction of Vacancies Using an Atomic Force Microscope Image.

  • Nishi Ryuji
    Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2–1 Yamada–oka, Suita, Osaka 565, Japan
  • Ohta Takayuki
    Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2–1 Yamada–oka, Suita, Osaka 565, Japan
  • Sugawara Yasuhiro
    Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2–1 Yamada–oka, Suita, Osaka 565, Japan
  • Morita Seizo
    Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2–1 Yamada–oka, Suita, Osaka 565, Japan
  • Okada Takao
    Joint Research Center for Atom Technology (JRCAT), 1–1–4 Higashi, Tsukuba, Ibaraki 305, Japan

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タイトル別名
  • Simulated Computed Tomography for the R

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We numerically demonstrate the possibility that vacancies as a typical kind of point defect inside a sample can be reconstructed from the force gradient distribution measured with the atomic force microscope using computed tomography (AFM-CT). By the calculation with the Lenard-Jones potential, it is predicted that the vacancy, even in the third layer, can be observed in the experimental force gradient. We show that the depth of the vacancy can be determined by tomography using only the attractive section of the force gradient distribution.

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