Electronically Induced Instability of a Hydrogen-Carbon Complex in Silicon and Its Dissociation Mechanism.
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- Kamiura Yoichi
- Faculty of Engineering, Okayama University, 3–1–1 Tsushima–naka, Okayama 700, Japan
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- Hayashi Masao
- Faculty of Engineering, Okayama University, 3–1–1 Tsushima–naka, Okayama 700, Japan
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- Nishiyama Yoshihide
- Faculty of Engineering, Okayama University, 3–1–1 Tsushima–naka, Okayama 700, Japan
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- Ohyama Shigeki
- Faculty of Engineering, Okayama University, 3–1–1 Tsushima–naka, Okayama 700, Japan
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- Yamashita Yoshifumi
- Faculty of Engineering, Okayama University, 3–1–1 Tsushima–naka, Okayama 700, Japan
書誌事項
- タイトル別名
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- Electronically Induced Instability of a
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抄録
We studied, by deep-level transient spectroscopy (DLTS), the dissociation mechanism of a hydrogen-carbon (H-C) complex, which has a donor level at E c-0.15 eV and acts as an electron trap in crystalline silicon. On the basis of our results and a previously proposed atomic model of the H-C complex, in which the hydrogen atom resides inside a silicon-carbon bond, we have proposed the following dissociation mechanism. The complex is stable in the positive charge state, and to dissociate it needs a hydrogen jump with an activation energy of 1.3 eV to break the bond with carbon and silicon. The complex becomes neutral by capturing an electron from the conduction band or accepting an electron directly from the valence band under electronic excitation, and is consequently dissociated at an activation energy of 0.5 eV due to the loss of binding. Strong evidence for the existence of the negative charge state of hydrogen in crystalline silicon is also presented.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 36 (11), 6579-6590, 1997
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390282681226270464
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- NII論文ID
- 110003905906
- 210000041925
- 130004523050
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- NII書誌ID
- AA10457675
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- COI
- 1:CAS:528:DyaK2sXnslGltLo%3D
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 4371418
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 使用不可