Threshold Ionization Mass Spectrometry of BrCN: Gas-Phase Reaction Channels Which Determine the Nitrogen Contents in Amorphous Carbon Nitride Films.

• Ito Haruhiko

  Department of Chemistry, Nagaoka University of Technology, Kamitomioka, Nagaoka, Niigata 940-2188, Japan

• Sato Akira

  Department of Chemistry, Nagaoka University of Technology, Kamitomioka, Nagaoka, Niigata 940-2188, Japan

• Saitoh Hidetoshi

  Department of Chemistry, Nagaoka University of Technology, Kamitomioka, Nagaoka, Niigata 940-2188, Japan

抄録

The dissociative ionization process of BrCN was studied using the threshold ionization mass spectrometry. The threshold of the production of C⁺ was determined as 23.3 ± 1.0 eV. From the discussion based on this result, the low (≤0.2) concentration of the N atoms in the amorphous carbon nitride films formed from the dissociative excitation reaction of BrCN with the electron cyclotron resonance plasma of Ar was considered to originate in the effective production of C and C⁺ by the impact of high-energy electrons.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 41 (8), 5449-5450, 2002

  The Japan Society of Applied Physics

キーワード

• threshold ionization mass spectrometry
• dissociative ionization
• BrCN
• amorphous carbon nitride
• nitrogen content

詳細情報

• CRID: 1390282681231442304
• NII論文ID: 210000051944
• NII論文ID: 130004529975
• DOI: 10.1143/jjap.41.5449
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/41/i=8R/a=5449/pdf
• 本文言語コード: en
• データソース種別:
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• 抄録ライセンスフラグ: 使用不可