High Sensitivity InSb Ultra-Thin Film Micro-Hall Sensors for Bioscreening Applications

• Sandhu Adarsh

  Quantum Nanoelectronics Research Center, Tokyo Institute of Technology

• Sanbonsugi Hideaki

  Department of Electrical Engineering, Tokyo Institute of Technology

• Shibasaki Ichiro

  Asahikasei Corporation

• Abe Masanori

  Department of Physical Electronics, Tokyo Institute of Technology

• Handa Hiroshi

  Graduate School of Bioscience and Biotechnology, Frontier Collaborative Research Center, Tokyo Institute of Technology

抄録

A high sensitivity, 4.5μm×4.5μm InSb thin film micro-Hall sensor (micro-HS) with a minimum field detection (B_min) of 77 nT/(Hz)^1⁄2 was developed for bioscreening applications and used for the detection of a single 2.8 μm diameter superparamagnetic microbead by monitoring its ac magnetic susceptibility. The scalability of the InSb micro-HS was demonstrated by fabricating 500nm×500nm InSb nano-Hall sensors with B_min of 0.72 μT/(Hz)^1⁄2 that could potentially be used to detect 100 nm sized superparamagnetic particles.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 43 (7A), L868-L870, 2004

  The Japan Society of Applied Physics

キーワード

• biosensor
• hall effect
• nanoparticles
• nanoelectronics
• biotechnology
• bioscreening
• superparamagnetic particles
• magnetic labeling
• DNA analysis
• ac susceptibility

詳細情報

• CRID: 1390001206266481792
• NII論文ID: 10013276811
• NII論文ID: 130004532441
• NII論文ID: 210000057350
• NII書誌ID: AA11906093
• DOI: 10.1143/jjap.43.l868
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• NDL書誌ID: 6996151
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6996151
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.43.L868
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.43.L868/pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可