Production of Volume Wave Plasma with Internally Mounted Cylindrical Planar Microwave Launcher and Two-Dimensional Field Analysis Using Finite Difference Time Domain Method
-
- Ogino Akihisa
- Faculty of Engineering, Shizuoka University
-
- Naito Katsutoshi
- Faculty of Engineering, Shizuoka University
-
- Terashita Fumie
- Faculty of Engineering, Shizuoka University
-
- Nanko Shohei
- Nissin Inc.
-
- Nagatsu Masaaki
- Faculty of Engineering, Shizuoka University
この論文をさがす
抄録
In this paper, we presented experimental results on the production of volume wave plasma (VWP) using an internally mounted cylindrical planar microwave launcher, for application to novel plasma processings, such as inner wall coating, impurity-free etching or internal sterilization of medical instruments using VWP. It was demonstrated that the ellipsoidal VWP is produced in front of a microwave launcher in He or Ar gas atmosphere. Numerical analyses of microwave fields radiated from a planar launcher have been carried out using the two-dimensional finite difference time domain (FDTD) method to determine the mechanism of VWP production in middle of the chamber. It was shown that the calculation results showed fairly good agreements with the experimental results measured using a dipole antenna probe. The spatial distributions of plasma density and the temperature of VWP were also measured using a double probe. It was found that the electron density is comparable to or slightly less than cutoff density of 7.4×1010 cm−3 corresponding to the microwave frequency of fm=2.45 GHz, and that the electron temperature is approximately 6 eV at the plasma center.
収録刊行物
-
- Japanese Journal of Applied Physics
-
Japanese Journal of Applied Physics 44 (8-11), L352-L354, 2005
The Japan Society of Applied Physics
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1390282681242012160
-
- NII論文ID
- 10014506109
- 210000059510
- 130004534550
-
- NII書誌ID
- AA11906093
-
- ISSN
- 13474065
- 00214922
-
- NDL書誌ID
- 7288548
-
- 本文言語コード
- en
-
- データソース種別
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可