Enhancement of Polarization Property of PZT Film by Ion-Substitution Using Rare-Earth Elements
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- Nakaki Hiroshi
- Department of Chemistry, Sophia University
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- Uchida Hiroshi
- Department of Chemistry, Sophia University
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- Nishida Ken
- Department of Electronic and Photonic System Engineering, Kochi University
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- Osada Minoru
- Advanced Materials Laboratory, National Institute of Materials Science (NIMS)
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- Funakubo Hiroshi
- Department of Innovative and Engineered Materials, Tokyo Institute of Technology
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- Katoda Takashi
- Department of Electronic and Photonic System Engineering, Kochi University
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- Koda Seiichiro
- Department of Chemistry, Sophia University
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抄録
Rare-earth-substituted lead zirconate titanate thin films were synthesized to improve the ferroelectric properties of lead zirconate titanate through the enhancement of its crystal anisotropy. Thin films of Pb1.00−(3x⁄2)REx(Zr0.40Ti0.60)O3 [RE-PZT(A)] and Pb1.00REx(Zr0.40Ti0.60)1−(3x⁄4)O3 [RE-PZT(B)] with RE=La or Dy were deposited on (111)Pt/Ti/SiO2/(100)Si substrates by chemical solution deposition (CSD). Rare-earth-substitution did not affect the crystal orientation of the PZT-based films where the PZT(111) plane was oriented along the surface-normal direction. Dy3+ substitution based on Dy-PZT(B) up to x=0.02 enhanced the crystal anisotropy (c⁄a) and remanent polarization (Pr) of PZT films simultaneously, while both c⁄a and Pr values of Dy-PZT(A) decreased as x increased continuously. On the other hand, La3+ substitution degraded the ferroelectric properties gradually in both the case of La-PZT(A) and (B). The Dy3+ ion could be substituted for a B-site in a PZT crystal preferentially, and that promoted the crystal anisotropy and the ferroelectric properties of PZT films.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 44 (9B), 6905-6909, 2005
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390282681242182656
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- NII論文ID
- 210000058802
- 40006898852
- 130004534673
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 7460177
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
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