Enhancement of Polarization Property of PZT Film by Ion-Substitution Using Rare-Earth Elements

この論文をさがす

抄録

Rare-earth-substituted lead zirconate titanate thin films were synthesized to improve the ferroelectric properties of lead zirconate titanate through the enhancement of its crystal anisotropy. Thin films of Pb1.00−(3x⁄2)REx(Zr0.40Ti0.60)O3 [RE-PZT(A)] and Pb1.00REx(Zr0.40Ti0.60)1−(3x⁄4)O3 [RE-PZT(B)] with RE=La or Dy were deposited on (111)Pt/Ti/SiO2/(100)Si substrates by chemical solution deposition (CSD). Rare-earth-substitution did not affect the crystal orientation of the PZT-based films where the PZT(111) plane was oriented along the surface-normal direction. Dy3+ substitution based on Dy-PZT(B) up to x=0.02 enhanced the crystal anisotropy (ca) and remanent polarization (Pr) of PZT films simultaneously, while both ca and Pr values of Dy-PZT(A) decreased as x increased continuously. On the other hand, La3+ substitution degraded the ferroelectric properties gradually in both the case of La-PZT(A) and (B). The Dy3+ ion could be substituted for a B-site in a PZT crystal preferentially, and that promoted the crystal anisotropy and the ferroelectric properties of PZT films.

収録刊行物

被引用文献 (3)*注記

もっと見る

参考文献 (16)*注記

もっと見る

詳細情報 詳細情報について

問題の指摘

ページトップへ