Dynamic Characteristic of an Optical Switch Using Deformation of a Thin Film Mirror

• Matsumoto Yuki

  Tokyo Institute of Technology

• Hagiwara Toshinobu

  Tokyo Institute of Technology

• Okutsu Kazutoshi

  Tokyo Institute of Technology

• Sato Kaiji

  Tokyo Institute of Technology

Bibliographic Information

Other Title

• 薄膜ミラーの変形を利用した光スイッチの動特性

Abstract

This paper describes the dynamic characteristic of a new optical switch based on MEMS techniques. The authors have been studying the new optical switch using deformation of a thin film mirror. It consists of two substrates which have many electrodes and the thin film mirror. The shape of the thin film mirror is deformed by electrostatic force. The switch has a simple structure and a large reflecting angle with small strain. In this paper, the effects of the gap between the substrates and the thickness of the thin film mirror on switching performance and driving voltage are examined experimentally. The experimental results show that the switch can be driven by 80V impressed voltage when the gap between the substrates is 0.5mm.

Journal

• Proceedings of JSPE Semestrial Meeting

  Proceedings of JSPE Semestrial Meeting 2005A (0), 997-998, 2005

  The Japan Society for Precision Engineering

Keywords

• optical switch
• thin film mirror
• electrostatic force
• MEMS

Details

• CRID: 1390001205649054848
• NII Article ID: 130004657282
• DOI: 10.11522/pscjspe.2005a.0.997.0
• Data Source:
  • JaLC
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed