Attempt of time-resolved observation in ultra-short laser process

• Kettoku Yoshitoshi

  Nagaoka University of Technology

• Ito Yoshiro

  Nagaoka University of Technology

Bibliographic Information

Other Title

• 超短パルスレーザーによる加工プロセスの時間分解観察の試み

Abstract

A femto-second laser is a promising tool in precise micromachining with little heat affected zone. In the ultra-short pulse laser machining, however, there are many problems to be solved and the process should be examined in detail. In this paper, we have developed a fast imaging system which is applicable to the femto-second laser process and observed the femto-second laser drilling process of glass, silicon and metals with pico-second time resolution. The imaging system and the time-resolved observation results are described.

Journal

• Proceedings of JSPE Semestrial Meeting

  Proceedings of JSPE Semestrial Meeting 2005S (0), 347-347, 2005

  The Japan Society for Precision Engineering

Keywords

• femtosecond laser
• imaging
• pulse picker

Details

• CRID: 1390282680626469888
• NII Article ID: 130004657506
• DOI: 10.11522/pscjspe.2005s.0.347.0
• Data Source:
  • JaLC
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed