Surface micromachining with multi-axes vibration tool and its application

• Yoshida Fumito

  Graduate School of Tokyo Metropolitan University

• Moronuki Nobuyuki

  Graduate School of Tokyo Metropolitan University

Bibliographic Information

Other Title

• 多軸振動工具による表面微細加工とその応用

Abstract

High-speed and low-cost texturing technology is required in various fields. It is already known that fine ductile micromachining of brittle material such as glass is possible with ultrasonic vibration tool if the depth of cut is small. Applying horizontal vibration (70-280Hz) to the vibrated tiny tool, surface micro texturing, as transcription of the horizontal tool locus, is expected. This paper demonstrates the texturing on glass surface with multi-axes vibration tool (f0.1mm), and effects of tool shape and frequency of tool vibration on machined groove are made clear.

Journal

• Proceedings of JSPE Semestrial Meeting

  Proceedings of JSPE Semestrial Meeting 2005S (0), 385-385, 2005

  The Japan Society for Precision Engineering

Keywords

• ultrasonic machining
• multi-axes vibration
• glass
• texture

Details

• CRID: 1390282680627208320
• NII Article ID: 130004657541
• DOI: 10.11522/pscjspe.2005s.0.385.0
• Data Source:
  • JaLC
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed