An Instrument for Nanomachining and Nanometrology of Free-form Surface profiles with a Diamond Turning Machine

• Kudo Yasuto

  Tohoku University

• Gao Wei

  Tohoku University

• Kiyono Satoshi

  Tohoku University

Bibliographic Information

Other Title

• 形状測定機能を持つナノ加工プローブに関する研究
• 機上形状計測加工実験

Abstract

This paper presents a nanomachining instrument with nanometrology function for precision nanofabrication of large area free-form surfaces. The diamond tool for diamond turning is mounted on one end of PZT for nanomachining of micro-structures through employing the fast-tool-servo technique. The same instrument can also be used for nanometrology of the machined surface through utilizing the output of the force sensor mounted on the other end of the PZT. During the scanning to measure the surface profile, the diamond tool is servo controlled by the PZT so that the tool tip is kept contact with the surface with a constant contact force. The displacement of the PZT, which corresponds to the profile height of the machined surface, can thus be obtained from the capacitance sensor inside the PZT.

Journal

• Proceedings of JSPE Semestrial Meeting

  Proceedings of JSPE Semestrial Meeting 2005S (0), 802-802, 2005

  The Japan Society for Precision Engineering

Keywords

• free-form
• surface profile
• fast tool servo
• force sensor
• displacement sensor

Details

• CRID: 1390282680630126848
• NII Article ID: 130004657913
• DOI: 10.11522/pscjspe.2005s.0.802.0
• Data Source:
  • JaLC
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed