Development of a New Scanning Ion Microbeam Analysis and Imaging Technique: Ion-Luminescence Microscopic Imaging and Spectroscopy (ILUMIS)

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A new microscopic imaging technique using a MeV ion microbeam probe was demonstrated for the nondestructive imaging and spectroscopy analysis of micrometer-sized targets. Visible luminescence caused from the impact of MeV ion irradiation was analyzed using a newly developed Ion-Luminescence (IL) Microscopic Imaging and Spectroscopy (ILUMIS) system based on a microbeam line of a 3 MV single-ended accelerator. Wavelength-dispersive images of IL were obtained from particulate targets with a spatial resolution of 1 μm and a wavelength resolution of 2 nm. Particular chemical state inside the target was successfully obtained through the spectroscopy of IL analysis.

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