Extension of Photopolymerization Region from the Nanoscale to the Macroscopic Scale Using a Chemically Amplified Photoresist

  • Ryoji Takahashi
    Department of Chemistry, Graduate School of Science and Engineering, Tokyo Institute of Technology
  • Satoshi Kaneko
    Department of Chemistry, Graduate School of Science and Engineering, Tokyo Institute of Technology
  • Shintaro Fujii
    Department of Chemistry, Graduate School of Science and Engineering, Tokyo Institute of Technology
  • Manabu Kiguchi
    Department of Chemistry, Graduate School of Science and Engineering, Tokyo Institute of Technology

Abstract

<jats:title>Abstract</jats:title> <jats:p>We have investigated the photopolymerization of a photoresist on Au nanoparticles. Photopolymerization proceeded when samples were irradiated with light wavelengths longer than 480 nm. This was verified by IR spectroscopy and the presence of an interference pattern under visible light due to the formation of a polymerized film on the substrate. The progress of photopolymerization was not observed on flat Au or quartz plates without the Au nanoparticles. The photopolymerization region was extended from the nanoscale to macroscopic scale using a chemically amplified photoresist at elevated temperatures. The source intensity, wavelength, reaction temperature, and irradiation time-dependence measurements revealed that interactions between the resist and the Au nanoparticles modified the electronic structure of the resists, or electron transfer from through interband excitation of Au. These interactions subsequently lead to a red shift in the threshold wavelength of photopolymerization.</jats:p>

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