半導体レーザの端子間電圧変化を利用した自己結合型距離センサ

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タイトル別名
  • Self-coupling Distance Sensor using a Terminal Voltage Change of the Semiconductor Laser
  • ハンドウタイ レーザ ノ タンシ カン デンアツ ヘンカ オ リヨウ シタ ジコ ケツゴウガタ キョリ センサ

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抄録

Demand for compact and simple sensor with high accuracy in the production line is increasing. A compact sensor using a self-coupling effect of the semiconductor laser has been studied. A measurement method which can detect self-coupling effect from change in terminal voltage of semiconductor laser without photodiode is proposed. It is confirmed that this sensor using terminal voltage change can measure a distance as same as sensor with photodiode. The measurable distance of this sensor is shorter than that with the photodiode. However, this sensor can be used as a shape measuring sensor with high accuracy by closely arranging semiconductor laser in a two-dimensional array.

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