High-Efficiency Nitride-Based Light-Emitting Diodes with Moth-Eye Structure

• Kasugai Hideki

  Department of Materials Science and Engineering, 21st-Century COE Program “Nano Factory”, Meijo University

• Miyake Yasuto

  Department of Materials Science and Engineering, 21st-Century COE Program “Nano Factory”, Meijo University

• Honshio Akira

  Department of Materials Science and Engineering, 21st-Century COE Program “Nano Factory”, Meijo University

• Mishima Shunsuke

  Department of Materials Science and Engineering, 21st-Century COE Program “Nano Factory”, Meijo University

• Kawashima Takeshi

  Department of Materials Science and Engineering, 21st-Century COE Program “Nano Factory”, Meijo University

• Iida Kazuyoshi

  Department of Materials Science and Engineering, 21st-Century COE Program “Nano Factory”, Meijo University

• Iwaya Motoaki

  Department of Materials Science and Engineering, 21st-Century COE Program “Nano Factory”, Meijo University

• Kamiyama Satoshi

  Department of Materials Science and Engineering, 21st-Century COE Program “Nano Factory”, Meijo University

• Amano Hiroshi

  Department of Materials Science and Engineering, 21st-Century COE Program “Nano Factory”, Meijo University

• Akasaki Isamu

  Department of Materials Science and Engineering, 21st-Century COE Program “Nano Factory”, Meijo University

• Kinoshita Hiroyuki

  SiXON Ltd.

• Shiomi Hiromu

  SiXON Ltd.

Abstract

Nitride-based blue light-emitting diodes (LEDs) with a moth-eye structure on the back of a 6H–SiC substrate have been developed. The moth-eye LED has a roughness less than the optical wavelength at the back surface of the SiC substrate fabricated by reactive ion etching (RIE) with CF₄ gas. The light extraction efficiency and corresponding output power have been increased to 3.8 times those of a LED with a conventional structure. The experimental findings agree with the results of a theoretical analysis of the effect of the moth-eye structure.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 44 (10), 7414-7417, 2005

  The Japan Society of Applied Physics

Keywords

• GaN
• SiC substrate
• LED
• moth-eye structure
• light extraction efficiency

Details

• CRID: 1390282681243354112
• NII Article ID: 130004766017
• NII Book ID: AA10457675
• DOI: 10.1143/jjap.44.7414
• ISSN: 13474065
• ISSN: 00214922
• NDL BIB ID: 7478710
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7478710
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.44.7414
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.44.7414/pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed