Generation of Long and High-Density Plasma Column Using Metal-Antenna Surface Wave-Excited Plasma Source

• Kousaka Hiroyuki

  Department of Mechanical Science and Engineering, Graduate School of Engineering, Nagoya University

• Xu Junqi

  Xi’an Institute of Technology

• Umehara Noritsugu

  Department of Mechanical Science and Engineering, Graduate School of Engineering, Nagoya University

抄録

We investigated the effect of gas pressure on the length of a microwave-excited high-density plasma column sustained along a graphite rod (25 cm in length and 1.0 cm in diameter), which was negatively biased against a grounded chamber. It was confirmed that the length of the overdense (>10¹¹ cm⁻³) plasma column increased with increasing gas pressure and negative voltage. At a gas pressure of 33 Pa, we obtained the longest plasma column covering the entire surface of the rod with a negative voltage of −150 V and an input microwave power of 100 W.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 44 (33-36), L1052-L1055, 2005

  The Japan Society of Applied Physics

キーワード

• microwave
• surface wave
• metal antenna
• high-density plasma
• plasma column
• plasma source

詳細情報

• CRID: 1390282681240537472
• NII論文ID: 210000059269
• NII論文ID: 130004766202
• NII書誌ID: AA11906093
• DOI: 10.1143/jjap.44.l1052
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/00214922
• ISSN: http://id.crossref.org/issn/13474065
• NDL書誌ID: 7425349
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7425349
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.44.L1052
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.44.L1052/pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可