Micro Cantilever Motion in Micro Pattern Peeling by DPAT Method

• Aiba Takashi

  Department of Electrical Engineering, Nagaoka University of Technology

• Kawai Akira

  Department of Electrical Engineering, Nagaoka University of Technology

Abstract

DPAT (Direct Peeling by using AFM tip) method provides direct measurement of a peeling force of micro-structure. A peeling force of micro polymer pattern at different peeling height is analyzed. When a cantilever is made a contact with a bottom of pattern, peeling force and displacement of cantilever are larger than in those of pattern top. The cantilever motion is analyzed peeling phenomena in different peel height. The peeling force of pattern is determined to around 1μN. The peeling force applying at pattern bottom reflects the adhesion force. The effectivity and accuracy of the DPAT method is discussed.

Journal

• Journal of Photopolymer Science and Technology

  Journal of Photopolymer Science and Technology 25 (6), 729-733, 2012

  The Society of Photopolymer Science and Technology(SPST)

Keywords

• polymer micro pattern
• atomic force microscope
• direct peeling by using AFM tip (DPAT)
• adhesion force
• cohesion failure
• interface failure

Details

• CRID: 1390001204324023040
• NII Article ID: 130004833508
• NII Article ID: 40019507387
• NII Book ID: AA11576862
• DOI: 10.2494/photopolymer.25.729
• ISSN: 13496336
• ISSN: 09149244
• NDL BIB ID: 024121694
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I024121694
• Web Site: https://www.jstage.jst.go.jp/article/photopolymer/25/6/25_729/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed