水晶振動子式メタノール濃度センサに関する数値計算と実証  [in Japanese] Numerical Calculation and Experimental Verification of a Quartz-crystal-resonator-based Methanol Concentration Sensor  [in Japanese]

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Author(s)

Abstract

In this paper, we report the numerical calculation and experimental verification of a quartz-crystal-resonator-based methanol concentration sensor for fuel cell applications. This sensor is composed of a quartz crystal resonator (QCR) and an interdigital capacitor (IDC). Our sensor can detect a very small capacitance change with a resolution of sub fF. The fabricated sensor can measure a methanol concentration with a resolution of 0.008 wt%. In the present study, we found out optimized sensor design (QCR and IDC) for the substrate thickness and the range of the methanol concentration. By the use of this study, the capacitive sensor with higher resolution can be realized, and it can be expected to apply to various types of capacitive sensors.

Journal

  • IEEJ Transactions on Sensors and Micromachines

    IEEJ Transactions on Sensors and Micromachines 134(7), 224-228, 2014

    The Institute of Electrical Engineers of Japan

Codes

  • NII Article ID (NAID)
    130004849030
  • NII NACSIS-CAT ID (NCID)
    AN1052634X
  • Text Lang
    JPN
  • ISSN
    1341-8939
  • NDL Article ID
    025641468
  • NDL Call No.
    Z16-B380
  • Data Source
    NDL  J-STAGE 
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