Numerical Calculation and Experimental Verification of a Quartz-crystal-resonator-based Methanol Concentration Sensor
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- Watanabe Takeru
- Graduate School of Science and Technology, Niigata University
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- Toyama Shinjiro
- Graduate School of Science and Technology, Niigata University
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- Sohgawa Masayuki
- Graduate School of Science and Technology, Niigata University
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- Abe Takashi
- Graduate School of Science and Technology, Niigata University
Bibliographic Information
- Other Title
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- 水晶振動子式メタノール濃度センサに関する数値計算と実証
- スイショウ シンドウシシキ メタノール ノウド センサ ニ カンスル スウチ ケイサン ト ジッショウ
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Abstract
In this paper, we report the numerical calculation and experimental verification of a quartz-crystal-resonator-based methanol concentration sensor for fuel cell applications. This sensor is composed of a quartz crystal resonator (QCR) and an interdigital capacitor (IDC). Our sensor can detect a very small capacitance change with a resolution of sub fF. The fabricated sensor can measure a methanol concentration with a resolution of 0.008 wt%. In the present study, we found out optimized sensor design (QCR and IDC) for the substrate thickness and the range of the methanol concentration. By the use of this study, the capacitive sensor with higher resolution can be realized, and it can be expected to apply to various types of capacitive sensors.
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 134 (7), 224-228, 2014
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390282679437230848
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- NII Article ID
- 130004849030
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 025641468
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed